For the application of vacuum-arc units in nanoengineering
Marzhan Mukhamedryskyzy  1, 2, *@  , Anuar Zhukeshov  1, 2@  , Assylgul Gabdullina  1, 2, *@  , Assem Amrenova  1, 2@  , Kuantay Fermakhan  1, 2@  , Nurgul Balmanova  1  , Rakhat Iliyasov  1  , Dastan Maksut  1  , Nurdaulet Mansur  1  
1 : Al-Farabi Kazakh National University
2 : National nanotechnology laboratory of open type
* : Corresponding author

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